Elimination of Carbon Contamination from Silicon Kerf Using a Furnace Aerosol Reactor Methodology-Reference-Cited by-同舟云学术

Elimination of Carbon Contamination from Silicon Kerf Using a Furnace Aerosol Reactor Methodology

Published:2015-06-01 Issue:22 Volume:54 Page:5914-5920
ISSN:0888-5885
Container-title:Industrial & Engineering Chemistry Research
language:en
Short-container-title:Ind. Eng. Chem. Res.

Author:

Vazquez-Pufleau Miguel¹,Chadha Tandeep S.¹,Yablonsky Gregory²,Erk Henry F.³,Biswas Pratim¹

Affiliation:

1. Aerosol and Air Quality Research Laboratory, Department of Energy, Environmental & Chemical Engineering, Washington University in St. Louis, St. Louis, Missouri 63130, United States

2. Parks College Department of Chemistry, Saint Louis University, St. Louis, Missouri 63103, United States

3. SunEdison Inc. 501 Pearl Drive, St. Peters, Missouri 63376, United States

Funder

National Science Foundation

Solar Energy Technologies Program

Basic Energy Sciences

Department of Scientific and Industrial Research, Ministry of Science and Technology

Publisher

American Chemical Society (ACS)

Subject

Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.iecr.5b00577

Reference42 articles.

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3. Metallographische Mitteilungen aus dem Institut für physikalische Chemie der Universität Göttingen. LXIII. Über Silicium-Aluminiumlegierungen

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