One-Step Photolithographic Surface Patterning of Nanometer-Thick Gold Surfaces by Using a Commercial DLP Projector and the Fabrication of a Microheater-Reference-Cited by-同舟云学术

One-Step Photolithographic Surface Patterning of Nanometer-Thick Gold Surfaces by Using a Commercial DLP Projector and the Fabrication of a Microheater

Published:2020-06-04 Issue:26 Volume:59 Page:12048-12055
ISSN:0888-5885
Container-title:Industrial & Engineering Chemistry Research
language:en
Short-container-title:Ind. Eng. Chem. Res.

Author:

Gregorini Michele¹^ORCID,Grass Robert N.¹^ORCID,Stark Wendelin J.¹^ORCID

Affiliation:

1. Institute for Chemical and Bioengineering, ETH Zurich, Vladimir-Prelog-Weg 1, 8093 Zürich, Switzerland

Funder

Eidgen?ssische Technische Hochschule Z?rich

Publisher

American Chemical Society (ACS)

Subject

Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.iecr.9b05837

Reference25 articles.

1. Surface Patterning

2. Patterning: Principles and Some New Developments

3. MCLPCB. A Guide to the PCB Manufacturing Process; https://www.mclpcb.com/pcb-manufacturing-process/ (accessed Aug 1, 2019).

4. Texas Instruments. TI DLP Technology for Lithography; Dallas, 2016; http://www.ti.com/lit/ml/dlpt025e/dlpt025e.pdf?&ts=1589538607620 (accessed 2016).

5. Kinetics of the decomposition of potassium ferrocyanide in ultra-violet light

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