1. VTT Technical Research Centre of Finland Ltd., Biologinkuja 5, 02150, Espoo, Finland
2. Institute
of Micro-Processing Engineering, Karlsruhe Institute of Technology, Campus North Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
3. INERATEC GmbH, Nördliche Uferstraße
4-6, 76189, Karlsruhe, Germany
4. School
of Chemical Technology, Aalto University, P.O. Box 11000, FI-00076, Aalto, Finland