Multimode Process Fault Detection Based on Local Density Ratio-Weighted Support Vector Data Description
Author:
Affiliation:
1. Department of Automation, Tsinghua University, Beijing 100084, China
Funder
National Natural Science Foundation of China
Publisher
American Chemical Society (ACS)
Subject
Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.iecr.6b03306
Reference40 articles.
1. Review of Recent Research on Data-Based Process Monitoring
2. Fault Detection Using the k-Nearest Neighbor Rule for Semiconductor Manufacturing Processes
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5. Process pattern construction and multi-mode monitoring
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