1. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1, Katahira, Aoba-ku, Sendai 980-8577, Japan
2. Graduate School of Environmental Studies, Tohoku University, 468-1, Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-0845, Japan
3. Ebara Corporation, Fujisawa District, 4-2-1 Honfujisawa, Fujisawa-shi, Kanagawa 251-8502, Japan
4. Ebara Environmental Plant Co., Ltd., 11-1, Haneda Asahi-cho, Ota-ku, Tokyo 144-0042, Japan