1. State Key Laboratory of Chemical Resource Engineering, Beijing University of Chemical Technology, Beijing 100029, People’s Republic of China
2. Xi’an Modern Chemistry Research Institute, Xi’an 710065, People’s Republic of China
3. Engineering Research Center of Preparation Technology of Ultra-Pure Chemicals for Integrated Circuits, Ministry of Education, Beijing University of Chemical Technology, Beijing 100029, People’s Republic of China
4. China North Industries Group Corporation Limited, Beijing 100000, People’s Republic of China