Reactive Distillation-Aided Ultrapure Silane Production from Trichlorosilane: Process Simulation and Optimization
Author:
Affiliation:
1. Department of Chemical Engineering, Shanghai Jiao Tong University, 800 Dong-Chuan Road, Shanghai 200240, China
Funder
China Postdoctoral Science Foundation
Publisher
American Chemical Society (ACS)
Subject
Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.iecr.6b03076
Reference22 articles.
1. Purification of silicon for photovoltaic applications
2. Highly Purified Silane Gas for Advanced Silicon Semiconductor Devices
3. Opportunities and challenges for a sustainable energy future
4. Silane Pyrolysis to Silicon Rod in a Bell-Jar Reactor at High Temperature and Pressure: Modeling and Simulation
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