1. School of Physics, School of Integrated Circuits and Electronics, Beijing Institute of Technology, Advanced Research Institute of Multidisciplinary Sciences, Beijing 100081, China
2. School of Integrated Circuits and Electronics, MIIT Key Laboratory for Low-Dimensional Quantum Structure and Devices, Beijing Institute of Technology, Beijing 100081, China
3. Department of Mechanical Engineering, City University of Hong Kong, Kowloon 999077, Hong Kong SAR, China
4. Applied Mechanics Laboratory, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China
5. BIT Chongqing Institute of Microelectronics and Microsystems, Chongqing 100190, China