Nanoscale Dopant Profiling of Individual Semiconductor Wires by Capacitance–Voltage Measurement
Author:
Affiliation:
1. Aledia, F-38130 Echirolles, France
2. Univ Grenoble Alpes, CNRS, Grenoble INP, Institut Néel, 38000 Grenoble, France
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.nanolett.0c04491
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