1. Department of Physics and Astronomy, LaserLaB, Vrije Universiteit, De Boelelaan 1081, 1081 HV Amsterdam, The Netherlands
2. Advanced Research Center for Nanolithography, Science Park 110, 1098 XG Amsterdam, The Netherlands
3. ASML, De Run 6501, 5504 DR Veldhoven, The Netherlands
4. Department of Physics and Astronomy, University of Rochester, Rochester, New York 14627, United States