Bubble-Pen Lithography

Author:

Lin Linhan12,Peng Xiaolei2,Mao Zhangming3,Li Wei24,Yogeesh Maruthi N.4,Rajeeva Bharath Bangalore2,Perillo Evan P.5,Dunn Andrew K.5,Akinwande Deji24,Zheng Yuebing12

Affiliation:

1. Department of Mechanical Engineering, The University of Texas at Austin, Austin, Texas 78712, United States

2. Materials Science & Engineering Program and Texas Materials Institute, The University of Texas at Austin, Austin, Texas 78712, United States

3. Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, Pennsylvania 16802, United States

4. Microelectronics Research Centre, The University of Texas at Austin, Austin, Texas 78758, United States

5. Department of Biomedical Engineering, The University of Texas at Austin, Austin, Texas 78712, United States

Funder

Arnold and Mabel Beckman Foundation

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

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