1. Terahertz Science Cooperative Innovation
Center, University of Electronic Science and Technology of China, Chengdu 610054, P. R. China
2. National Key Laboratory of Application Specific Integrated Circuit, Hebei Semiconductor Research Institute, Shijiazhuang 050000, China
3. National Key Laboratory of Communication, University of Electronic Science and Technology of China, Chengdu 610054, P. R. China
4. School
of Electronics Engineering, University of Electronic Science and Technology of China, Chengdu 610054, P. R. China
5. Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, Suzhou 215123, P. R. China