1. Guangdong Provincial Key Laboratory of Semiconductor Optoelectronic Materials and Intelligent Photonic Systems, Harbin Institute of Technology, Shenzhen 518055, P. R. China
2. School of Electronic Information and Engineering, Harbin Institute of Technology, Shenzhen 518055, P. R. China
3. Pengcheng Laboratory, Shenzhen 518055, P. R. China
4. Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, P. R. China