1. State Key Laboratory of Advanced Optical Communication Systems and Networks, School of Physics and Astronomy, Shanghai Jiao Tong University, Shanghai, 200240, People’s Republic of China
2. Key Laboratory for Thin Film and Microfabrication Technology of the Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, 200240, People’s Republic of China
3. Department of Instrument Science and Engineering, Shanghai Jiao Tong University, Shanghai, 200240, People’s Republic of China
4. Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yutian Road, Shanghai, 200083, People’s Republic of China
5. College of Optical and Electronic Technology, China Jiliang University, 258 Xueyuan Street, Hangzhou, 310018, Zhejiang, People’s Republic of China
6. School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai, 200240, People’s Republic of China