1. National Key Laboratory of Advanced Micro and Nano Manufacture Technology, School of Integrated Circuits, Peking University, Beijing, 100871, China
2. Academy for Advanced Interdisciplinary Studies and Center for Nanochemistry, Beijing Science and Engineering Center for Nanocarbons, Peking University, Beijing 100871, China
3. Beijing Graphene Institute, Beijing, China 100095, China
4. Beijing Advanced Innovation Center for Integrated Circuits, Beijing, China 100871, China