1. School of Science, Harbin Institute of Technology, Shenzhen 518055, China
2. Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
3. School of Integrated Circuits and Guangdong Provincial Key Laboratory of Semiconductor Optoelectronic Materials and Intelligent Photonic Systems, Harbin Institute of Technology, Shenzhen 518055, China