Scalable High-Precision Trimming of Photonic Resonances by Polymer Exposure to Energetic Beams
Author:
Affiliation:
1. Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, U.K.
2. Kirchhoff-Institute for Physics, Heidelberg University, 69120 Heidelberg, Germany
Funder
Engineering and Physical Sciences Research Council
HORIZON EUROPE European Innovation Council
H2020 Future and Emerging Technologies
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.nanolett.3c00220
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