Effect of Water Contact on the Density Distributions of Thin Supported Polymer Films Investigated by an X-ray Reflectivity Method
Author:
Affiliation:
1. Department of Materials Science and Engineering, POSTECH, Pohang-city, Gyeongbuk, South Korea
2. Memory Division, Samsung Electronics Co. Ltd, Hwasung-city, Gyeonggi-do, South Korea
Publisher
American Chemical Society (ACS)
Subject
Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/la1035085
Reference43 articles.
1. Liquid immersion lithography: evaluation of resist issues
2. Dielectric relaxation properties of the polymer coating during its exposition to water
3. The delamination of polymeric coatings from steel Part 3: Effect of the oxygen partial pressure on the delamination reaction and current distribution at the metal/polymer interface
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