Synthesis of Al(N3)3 and the Deposition of AlN Thin Films
Author:
Affiliation:
1. Department of Chemistry and Biochemistry, University of Denver, Denver, Colorado 80208
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Surfaces, Coatings and Films,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp9625873
Reference27 articles.
1. Formation of aluminum nitride films on GaAs(110) at room temperature by reactive molecular‐beam epitaxy: X‐ray and soft x‐ray photoemission spectroscopy
2. Aluminum nitride on silicon surface acoustic wave devices
3. Ultraviolet second harmonic generation in radio‐frequency sputter‐deposited aluminum nitride thin films
4. Preparation and properties of III‐V nitride thin films
5. Infrared and tunneling spectroscopy study of aluminum nitride films prepared by ion-beam deposition
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