Linear Stiffness Tuning in MEMS Devices via Prestress Introduced by TiN Thin Films-Reference-Cited by-同舟云学术

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Linear Stiffness Tuning in MEMS Devices via Prestress Introduced by TiN Thin Films

Published:2023-03-21 Issue:4 Volume:1 Page:1213-1219
ISSN:2771-9545
Container-title:ACS Applied Engineering Materials
language:en
Short-container-title:ACS Appl. Eng. Mater.

Author:

Zhuang Chao¹²^ORCID,Minami Kosuke²^ORCID,Shiba Kota²^ORCID,Yoshikawa Genki¹²^ORCID

Affiliation:

1. Materials Science and Engineering, Graduate School of Science and Technology, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8571, Japan

2. Center for Functional Sensor & Actuator (CFSN), Research Center for Functional Materials, National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

Funder

Japan Society for the Promotion of Science

National Institute for Materials Science

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsaenm.3c00034

Reference44 articles.

1. Comparative advantages of mechanical biosensors

2. Pattern Transformation Triggered by Deformation

3. Energy harvesting from low frequency applications using piezoelectric materials

4. Bistable Structures for Advanced Functional Systems

5. The Nanomechanical Bit

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Topology optimization for piezoresistive nanomechanical surface stress sensors in anisotropic 〈111〉 orientations;Nano Express;2023-08-31

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