1. Technology Innovation Center of Graphene Metrology and Standardization for State Market Regulation, Beijing Graphene Institute, Beijing 100095, China
2. National Key Laboratory of Advanced Micro and Nano Manufacture Technology, School of Integrated Circuits, Peking University, Beijing 100871, China
3. Beijing Advanced Innovation Center for Integrated Circuits, Beijing 100871, China
4. Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China
5. College of Energy, Soochow Institute for Energy and Materials Innovations, Key Laboratory of Advanced Carbon Materials and Wearable Energy Technologies of Jiangsu Province, Soochow University, Suzhou 215006, China