1. Institute of Photoelectric Nanoscience and Nanotechnology, School of Mechanical Engineering, Dalian University of Technology, Dalian 116024, China
2. Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China
3. Department of Electrical and Computer Engineering, Penn State Behrend, Erie, Pennsylvania 16563, United States