Combined Density Functional Theory and Microkinetics Study to Predict Optimum Operating Conditions of Si(100) Surface Carbonization by Acetylene for High Power Devices
Author:
Affiliation:
1. Department of Chemical Engineering, National Taiwan University of Science and Technology, Taipei 106, Taiwan
2. Department of Materials Science and Engineering, Feng Chia University, Taichung 40724, Taiwan
Funder
Ministry of Science and Technology, Taiwan
Publisher
American Chemical Society (ACS)
Subject
General Materials Science,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.jpclett.1c01044
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