ZnO Nanoparticle-Based MEMS Sensors for H2S Detection

Author:

Zhu Lecheng1,Rong Qian23,Yang Zheng3,Zhang Wei3,Jiao Mingzhi4,Song Jiming1ORCID,Wang Chunchang1ORCID,Guo Youmin1ORCID

Affiliation:

1. School of Materials Science and Technology, Anhui University, Hefei 230601, China

2. School of Materials, Sun Yat-sen University, Guangdong 510275, China

3. Hefei Micro-nano Sensing Technology Co., Ltd., Hefei 230000, China

4. Research Center for Internet of Things, State and Local Joint Engineering Laboratory of Perception Mine, China University of Mining and Technology, Xuzhou 221008, China

Funder

Anhui Provincial Key Research and Development Plan

Anhui Province

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

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