1. Joint Key Laboratory of the Ministry of Education, Institute of Applied Physics and Materials Engineering, University of Macau, Macau, China
2. School of Microelectronics Science and Technology, Sun Yat-sen University, Zhuhai519082, China
3. Guangdong Provincial Key Laboratory of Optoelectronic Information Processing Chips and Systems, Sun Yat-sen University, Zhuhai519082, China