1. State Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
2. Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University, Hangzhou 311200, China
3. Zhejiang Hua Display Optoelectronics Co., Ltd., Jiaxing 314115, China
4. Zhejiang Kechuang Advanced Materials Technology Co., Ltd., Hangzhou 310051, China