Effect of Electrode Nanopatterning on the Functional Properties of Ta/TaO<sub><i>x</i></sub>/Pt Resistive Memory Devices-Reference-Cited by-同舟云学术

Effect of Electrode Nanopatterning on the Functional Properties of Ta/TaO_x/Pt Resistive Memory Devices

Published:2022-06-13 Issue:6 Volume:5 Page:8594-8601
ISSN:2574-0970
Container-title:ACS Applied Nano Materials
language:en
Short-container-title:ACS Appl. Nano Mater.

Author:

Zhuk Maksim Yu.¹²,Sizykh Nikita A.¹,Kuzmichev Dmitry S.³,Chouprik Anastasia A.¹²,Zarubin Sergei S.¹,Gornev Evgeny S.⁴,Zenkevich Andrei V.¹^ORCID

Affiliation:

1. Laboratory of Functional Materials and Devices for Nanoelectronics, Moscow Institute of Physics and Technology (National Research University), Dolgoprudny 141700, Moscow Region, Russia

2. Laboratory of Neurocomputing Systems, Moscow Institute of Physics and Technology (National Research University), Dolgoprudny 141700, Moscow Region, Russia

3. Center of Shared Facilities, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Moscow Region, Russia

4. Molecular Electronics Research Institute Moscow 124460, Russia

Funder

Russian Foundation for Basic Research

Ministry of Science and Higher Education of the Russian Federation

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsanm.2c02076

Reference27 articles.