Reactant-Dependent, 108× Conductivity Modulation in Plasma-Enhanced Atomic Layer Deposition for Black TiO2 Films

Author:

Berriel S. Novia1,McNealy-James Terrick2ORCID,Currie Taylor M.3ORCID,Bissell Eric1,Butkus Brian1,Chen Chien-Hsuan1,Tomar Luis1,Baillie Jacob4,Gamelin Daniel R.4ORCID,Davis Kristopher O.15678ORCID,Jurca Titel398ORCID,Banerjee Parag1698ORCID

Affiliation:

1. Department of Materials Science and Engineering, University of Central Florida, Orlando, Florida 32816, United States

2. Department of Physics, University of Central Florida, Orlando, Florida 32816, United States

3. Department of Chemistry, University of Central Florida, Orlando, Florida 32816, United States

4. Department of Chemistry, University of Washington, Seattle, Washington 98195-1700, United States

5. Resilient Intelligent Sustainable Energy Systems Faculty Cluster, University of Central Florida, Orlando Florida 32816, United States

6. Florida Solar Energy Center, University of Central Florida, Cocoa Florida 32922, United States

7. CREOL, the College of Optics and Photonics, University of Central Florida, Orlando Florida 32816, United States

8. REACT Faculty Cluster, University of Central Florida, Orlando, Florida 32816, United States

9. Nano Science and Technology Center, University of Central Florida, Orlando, Florida 32816, United States

Funder

Semiconductor Research Corporation

Division of Electrical, Communications and Cyber Systems

Division of Materials Research

Publisher

American Chemical Society (ACS)

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