1. State Key Laboratory of Radio Frequency Heterogeneous Integration, College of Electronics and Information Engineering, Shenzhen University, Shenzhen 518060, China
2. Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System & Guangdong Provincial Key Laboratory of Semiconductor Optoelectronic Materials and Intelligent Photonic Systems, Harbin Institute of Technology, Shenzhen 518055, China
3. Guangdong Provincial Key Lab of Optoelectronic Materials and Chips, School of Science and Engineering, The Chinese University of Hong Kong (Shenzhen), Shenzhen 518172, China
4. Department of Physics, The Chinese University of Hong Kong, Shatin, Hong Kong SAR 999077, China
5. School of Physics and Technology and School of Microelectronics, Wuhan University, Wuhan 430072, Hubei, China
6. Henan Academy of Sciences, Zhengzhou 450046, Henan, China
7. Wuhan Institute of Quantum Technology, Wuhan 430205, Hubei, China