Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
Author:
Affiliation:
1. Laboratory of Inorganic Chemistry, Department of Chemistry, University of Helsinki, P.O. Box 55, FI-00014 Helsinki, Finland
2. Department of Physics, University of Helsinki, P.O. Box 43, FI-00014 Helsinki, Finland
Funder
ASM Microchemistry Oy
Finnish Centre of Excellence in Atomic Layer Deposition
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.6b03586
Reference46 articles.
1. Three-Dimensional Battery Architectures
2. Atomic Layer Deposition for All-Solid-State 3D-Integrated Batteries
3. Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges
4. Atomic Layer Deposition of Lithium Tantalate Solid-State Electrolytes
5. Atomic layer deposition of ferroelectric LiNbO3
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