Understanding and Utilizing Reactive Oxygen Reservoirs in Atomic Layer Deposition of Metal Oxides with Ozone
Author:
Affiliation:
1. Department of Chemical Engineering, Stanford University, Stanford, California 94305, United States
Funder
Division of Graduate Education
U.S. Department of Energy
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.2c00753
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