Synthesis of SnS Thin Films by Atomic Layer Deposition at Low Temperatures

Author:

Baek In-Hwan12,Pyeon Jung Joon13,Song Young Geun14,Chung Taek-Mo5ORCID,Kim Hae-Ryoung6,Baek Seung-Hyub17,Kim Jin-Sang1,Kang Chong-Yun13,Choi Ji-Won1,Hwang Cheol Seong2ORCID,Han Jeong Hwan58,Kim Seong Keun1ORCID

Affiliation:

1. Center for Electronic Materials, Korea Institute of Science and Technology, Seoul 02792, South Korea

2. Department of Materials Science and Engineering, and Inter-University Semiconductor Research Center, Seoul National University, Seoul 08826, South Korea

3. KU-KIST Graduate School of Converging Science and Technology, Korea University, Seoul 02841, South Korea

4. School of Electrical Engineering, Korea University, Seoul 02841, South Korea

5. Division of Advanced Materials, Korea Research Institute of Chemical Technology, Daejeon 34114, South Korea

6. High-Temperature Energy Materials Research Center, Korea Institute of Science and Technology, Seoul 02792, South Korea

7. Department of Nanomaterials Science and Technology, Korea University of Science and Technology, Daejeon 34113, South Korea

8. Department of Materials Science and Engineering, Seoul National University of Science and Technology, Seoul 01811, South Korea

Funder

National Research Council of Science and Technology

National Research Foundation of Korea

Korea Institute of Science and Technology

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

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