Atomic Layer Deposition of the Solid Electrolyte LiPON
Author:
Affiliation:
1. Department of Materials Science & Engineering and ‡Institute for Systems Research, University of Maryland, College Park, Maryland 20742, United States
Funder
Bureau of Educational and Cultural Affairs
Basic Energy Sciences
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.5b01654
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