Nanoimprint Lithography Processing of Inorganic-Based Materials
Author:
Affiliation:
1. Aix-Marseille Université, CNRS, IM2NP UMR 7334, Campus de St. Jérôme, 13397 Marseille, France
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.1c00693
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