1. Institute of Medical Chips, Ruijin Hospital, Shanghai Jiao Tong University School of Medicine, Shanghai, 200025, China
2. School of Microelectronics, Shanghai University, Shanghai, 201800, China
3. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China
4. State Key Laboratory of Silicon Materials and Advanced Semiconductor Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China