Characterization of Nanoporous Low-k Thin Films by Small-Angle Neutron Scattering Contrast Variation-Reference-Cited by-同舟云学术

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Characterization of Nanoporous Low-k Thin Films by Small-Angle Neutron Scattering Contrast Variation

Published:2003-12-19 Issue:2 Volume:20 Page:416-422
ISSN:0743-7463
Container-title:Langmuir
language:en
Short-container-title:Langmuir

Author:

Hedden Ronald C.¹,Lee Hae-Jeong¹,Bauer Barry J.¹

Affiliation:

1. Polymers Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899

Publisher

American Chemical Society (ACS)

Subject

Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/la035384w

Reference17 articles.

1. The Use of Contrast-Matching Small-Angle Neutron-Scattering Techniques to Monitor Closed Porosity in Carbons

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