1. Microelectronics and Materials Physics Laboratories, and EMPART Research Group of Infotech Oulu, Department of Electrical and Information Engineering, University of Oulu; P.O. Box 4500, FIN-90014 University of Oulu, Finland
2. Mass and Heat Transfer Process Laboratory, Department of Process and Environmental Engineering, University of Oulu, P.O. Box 4300, FIN-90014 University of Oulu, Finland
3. Department of Applied and Environmental Chemistry, University of Szeged, Rerrich B. tér 1, H-6720 Szeged, Hungary
4. Department of Mechanical Engineering and Materials Science, Rice University, Houston, Texas 77005