1. Laser Micro/Nano-Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, 5 South Zhongguancun Street, Haidian District, Beijing 100081, P. R. China
2. Yangtze Delta Region Academy of Beijing Institute of Technology, Jiaxing 314019, China
3. Beijing Institute of Technology Chongqing Innovation Center, Chongqing 401120, China
4. Tianjin Navigation Instruments Research Institute, No. 268 Dingzigu No. 1 Street,
Hong Qiao District, Tianjin 300131, China