1. National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
2. Tosoh Corporation, 1-8 Kasumi, Yokkaichi, Mie 510-8540, Japan
3. Tosoh Corporation, 3-8-2 Shiba, Minato-ku, Tokyo 105-8623, Japan