Electron Irradiation-Induced Degradation of TiN Thin Films on Quartz and Sapphire Substrates-Reference-Cited by-同舟云学术

Electron Irradiation-Induced Degradation of TiN Thin Films on Quartz and Sapphire Substrates

Published:2023-12-22 Issue:1 Volume:9 Page:925-933
ISSN:2470-1343
Container-title:ACS Omega
language:en
Short-container-title:ACS Omega

Author:

Akhtanova Gulnur¹^ORCID,Yerlanuly Yerassyl²³^ORCID,Parkhomenko Hryhorii P.¹^ORCID,Solovan Mykhailo V.⁴,Mostovyi Andrii I.¹⁵,Nurmukhanbetova Aliya K.⁶,Kireyev Alexander V.⁷,Danko Igor V.⁷^ORCID,Oreshkin Pavel A.⁷,Zholdybayev Timur K.²⁷,Janseitov Daniyar M.²⁷,Ramazanov Tlekkabul S.²,Brus Viktor V.¹^ORCID

Affiliation:

1. Department of Physics, Nazarbayev University, Astana 010000, Kazakhstan

2. Al-Farabi Kazakh National University, Almaty 050040, Kazakhstan

3. Kazakh-British Technical University, Almaty 050000, Kazakhstan

4. Faculty of Physics, Adam Mickiewicz University, Poznan 61-614, Poland

5. Department of Electronics and Energy Engineering, Yuriy Fedkovych Chernivtsi National University, Chernivtsi 58012, Ukraine

6. Energetic Cosmos Laboratory, Nazarbayev University, Astana 010000, Kazakhstan

7. Institute of Nuclear Physics, Almaty 050032, Kazakhstan

Funder

Ministry of Education and Science of the Republic of Kazakhstan

Nazarbayev University

Publisher