Gas Phase Reaction of Silane with Water at Different Temperatures and Supported by Plasma-Reference-Cited by-同舟云学术

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Gas Phase Reaction of Silane with Water at Different Temperatures and Supported by Plasma

Published:2023-02-24 Issue:9 Volume:8 Page:8388-8396
ISSN:2470-1343
Container-title:ACS Omega
language:en
Short-container-title:ACS Omega

Author:

Szafarska Maik¹^ORCID,Olszok Vinzent²^ORCID,Holländer Ulrich³,Gustus René¹,Weber Alfred P.²,Maus-Friedrichs Wolfgang¹

Affiliation:

1. Clausthal Centre of Materials Technology, Clausthal University of Technology, Leibnizstrasse 9, 38678 Clausthal-Zellerfeld, Germany

2. Institute of Particle Technology, Clausthal University of Technology, Leibnizstrasse 19, 38678 Clausthal-Zellerfeld, Germany

3. Institut für Werkstoffkunde (Materials Science), Leibniz Universität Hannover, An der Universität 2, 30823 Garbsen, Germany

Funder

Deutsche Forschungsgemeinschaft

Publisher

American Chemical Society (ACS)

Subject

General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acsomega.2c07209

Reference39 articles.

1. The chemistry of volatile waste from silicon wafer processing

2. Numerical study of low- and high-temperature silane combustion

3. The Thermal Decomposition of Silane

4. Stoichiometry and possible mechanism of SiH4O2 explosions

5. Kinetics of the SiH3 + O2 and SiH3 + NO2 reactions

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study of the effect of oxygen level on tool wear in machining Ti-6Al-4V;CIRP Annals;2024

2. Oxygen-free production: Influence of silane-doped atmosphere on porosity and mechanical properties of Ti-6Al-4V processed by PBF-LB;Procedia CIRP;2024

3. Pressing and Sintering of Titanium Aluminide Powder after Ball Milling in Silane-Doped Atmosphere;Journal of Manufacturing and Materials Processing;2023-09-19

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