Sub-10 μm-Thick Ge Thin Film Fabrication from Bulk-Ge Substrates via a Wet Etching Method
Author:
Affiliation:
1. Department of Materials Engineering, The University of British Columbia, Vancouver, BC V6T 1Z4, Canada
2. Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
Funder
Southern University of Science and Technology
Natural Sciences and Engineering Research Council of Canada
CMC Microsystems
University of British Columbia
Publisher
American Chemical Society (ACS)
Subject
General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acsomega.3c07490
Reference41 articles.
1. Shiflett, K.; Karanth, A.; Bunescu, R.; Louri, A. In Flumen: Dynamic Processing in the Photonic Interconnect, Proceedings of the 50th Annual International Symposium on Computer Architecture, 2023; pp 1–13.
2. Wolf, P.; Moser, P.; Larisch, G.; Hofmann, W.; Li, H.; Lott, J. A.; Lu, C.Y.; Chuang, S. L.; Bimberg, D. In Energy-efficient and Temperature-stable High-speed VCSELs for Optical Interconnects, 2013 15th International Conference on Transparent Optical Networks (ICTON), IEEE, 2013; pp 1–5.
3. Rationale and challenges for optical interconnects to electronic chips
4. Optical modulators
5. Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications
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