1. Light Technology Institute, Karlsruhe Institute of Technology, 76131 Karlsruhe, Germany
2. Institute for Applied Materials, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
3. Laboratory for Electron Microscopy, Karlsruhe Institute of Technology, 76131 Karlsruhe, Germany
4. Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany