Experimental Study of the Influence of CH<sub>4</sub> and H<sub>2</sub> on the Conformation, Chemical Composition, and Luminescence of Silicon Quantum Dots Inlaid in Silicon Carbide Thin Films Grown by Remote Plasma-Enhanced Chemical Vapor Deposition-Reference-Cited by-同舟云学术

Experimental Study of the Influence of CH₄ and H₂ on the Conformation, Chemical Composition, and Luminescence of Silicon Quantum Dots Inlaid in Silicon Carbide Thin Films Grown by Remote Plasma-Enhanced Chemical Vapor Deposition

Published:2022-06-01 Issue:23 Volume:7 Page:19640-19647
ISSN:2470-1343
Container-title:ACS Omega
language:en
Short-container-title:ACS Omega

Author:

León-Guillén Rodrigo¹,Muñoz-Rosas Ana Luz¹,Arenas-Alatorre Jesús A.¹,Alonso-Huitrón Juan Carlos²,Pérez-Martínez Ana Laura³,Rodríguez-Gómez Arturo¹^ORCID

Affiliation:

1. Instituto de Física, Universidad Nacional Autónoma de México, Circuito de la Investigación Científica s/n, Ciudad Universitaria, A.P. 20-364, Coyoacán, Ciudad de México 04510, México

2. Instituto de Investigaciones en Materiales, Universidad Nacional Autónoma de México, Ciudad Universitaria, A.P. 70-360, Coyoacán, Ciudad de México 04510, México

3. Facultad de Ingeniería, División de Ciencias Básicas, Universidad Nacional Autónoma de México, Circuito Exterior s/n, Ciudad Universitaria, Coyoacán, Ciudad de México 04510, México

Funder

Universidad Nacional Aut?noma de M?xico

Consejo Nacional de Ciencia y Tecnolog?a

Publisher

American Chemical Society (ACS)

Subject

General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acsomega.2c01384

Reference59 articles.

1. Silicon as a mitigator of water deficit stress in radish crop

2. Surface Engineering of Silicon Quantum Dots: Does the Ligand Length Impact the Optoelectronic Properties of Light‐Emitting Diodes?

3. Quantum-size effects of interacting electrons and holes in semiconductor microcrystals with spherical shape

4. Combined study of the effect of deposition temperature and post-deposition annealing on the photoluminescence of silicon quantum dots embedded in chlorinated silicon nitride thin films

5. Quantum confinement effect of silicon nanocrystals in situ grown in silicon nitride films

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