Wafer-Scale Fabrication of Silicon Nanocones via Controlling Catalyst Evolution in All-Wet Metal-Assisted Chemical Etching-Reference-Cited by-同舟云学术

Wafer-Scale Fabrication of Silicon Nanocones via Controlling Catalyst Evolution in All-Wet Metal-Assisted Chemical Etching

Published:2022-01-04 Issue:2 Volume:7 Page:2234-2243
ISSN:2470-1343
Container-title:ACS Omega
language:en
Short-container-title:ACS Omega

Author:

Bian Chenyu¹,Zhang Bingchang²^ORCID,Zhang Zhenghe²,Chen Hui²,Zhang Dake¹,Wang Shaojun²^ORCID,Ye Jing³,He Le¹^ORCID,Jie Jiansheng¹⁴^ORCID,Zhang Xiaohong¹^ORCID

Affiliation:

1. Institute of Functional Nano & Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials & Devices, Soochow University, Suzhou 215123, Jiangsu, People’s Republic of China

2. School of Optoelectronic Science and Engineering, Key Laboratory of Advanced Optical Manufacturing Technologies of Jiangsu Province, Key Laboratory of Modern Optical Technologies of Education Ministry of China, Suzhou 215123, Jiangsu, People’s Republic of China

3. Testing & Analysis Center, Soochow University, Suzhou 215123, Jiangsu, People’s Republic of China

4. Macao Institute of Materials Science and Engineering, Macau University of Science and Technology, Taipa 999078, Macau SAR, People’s Republic of China

Funder

Collaborative Innovation Center of Suzhou Nano Science and Technology

Natural Science Foundation of Jiangsu Province

National Natural Science Foundation of China

Priority Academic Program Development of Jiangsu Higher Education Institutions

Higher Education Discipline Innovation Project

Opening Foundation of Jiangsu Key Laboratory for Carbon-Based Functional Materials & Devices

Entrepreneurship and Innovation Doctor of Jiangsu Province

Publisher

American Chemical Society (ACS)

Subject

General Chemical Engineering,General Chemistry