High-Resolution Three-Dimensional Mapping of Semiconductor Dopant Potentials
Author:
Affiliation:
1. Department of Materials Science, University of Cambridge, Pembroke Street, Cambridge, CB2 3QZ, United Kingdom
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/nl070858n
Reference17 articles.
1. Semiconductor Industry Association roadmap 2005 updatehttp://public.itrs.net/.
2. Where Do the Dopants Go?
3. Dopant mapping for the nanotechnology age
4. Frank, J.Electron Tomography: Three-Dimensional Imaging with theTransmission Electron Microscope, Plenum Press: New York, 1992.
5. Lift-out techniques coupled with advanced TEM characterization methods for electrical failure analysis
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