Nonlinear Feedback Control of Surface Roughness Using a Stochastic PDE: Design and Application to a Sputtering Process
Author:
Affiliation:
1. Advanced Projects Research, Inc., 1925 McKinley Avenue, Suite B, La Verne, California 91750, and Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, California 90095
Publisher
American Chemical Society (ACS)
Subject
Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ie060410h
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