Enhanced Doping Efficiency of Al-Doped ZnO by Atomic Layer Deposition Using Dimethylaluminum Isopropoxide as an Alternative Aluminum Precursor
Author:
Affiliation:
1. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands
2. Holst Centre, P.O. Box 8550, 5605 KN Eindhoven, The Netherlands
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm402974j
Reference20 articles.
1. Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing
2. Development of Ga-doped ZnO transparent electrodes for liquid crystal display panels
3. High-mobility thin-film transistor with amorphous InGaZnO4 channel fabricated by room temperature rf-magnetron sputtering
4. The effects of thickness and operation temperature on ZnO:Al thin film CO gas sensor
5. Zinc oxide thin films: Characterization and potential applications
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