Exploring the Evolution of Organofluorine-Containing Compounds during Simulated Photolithography Experiments
Author:
Affiliation:
1. School of Civil and Environmental Engineering, Cornell University, Ithaca, New York 14853, United States
Funder
Division of Graduate Education
Semiconductor Research Corporation
Publisher
American Chemical Society (ACS)
Subject
Environmental Chemistry,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.est.3c03410
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