Aqueous Solutions for Low-Temperature Photoannealing of Functional Oxide Films: Reaching the 400 °C Si-Technology Integration Barrier
Author:
Affiliation:
1. Inorganic and Physical Chemistry Group, Institute for Materials Research, Universiteit Hasselt, IMEC vzw, Division IMOMEC, B-3590 Diepenbeek, Belgium
2. Instituto de Ciencia de Materiales de Madrid, C.S.I.C., Cantoblanco, E-28049 Madrid, Spain
Publisher
American Chemical Society (ACS)
Subject
Colloid and Surface Chemistry,Biochemistry,General Chemistry,Catalysis
Link
https://pubs.acs.org/doi/pdf/10.1021/ja203553n
Reference31 articles.
1. Chemical solution deposition of electronic oxide films
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3. Sol-gel-derived lead titanate films
4. Preparation of Inorganic Materials Using Ionic Liquids
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